Numerical Investigations of Infrared Slot Waveguides for Gas Sensing

Proceedings

Grille, Thomas¹  Ranacher, Christian²  Jannesari, Reyhaneh³  Consani, Cristina⁴  Jakoby, Bernhard⁵ 

[1] Author to whom correspondence should be addressed.;Carinthian Tech Research AG, 9524 Villach, Austria;Infineon Technologies Austria AG, 9500 Villach, Austria;Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.

关键词: silicon photonics;    mid-infrared sensing;    slot waveguide;   

DOI  :  10.3390/proceedings2130799

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.

【 授权许可】

CC BY