Optimization of Si-Based Waveguides for Evanescent-Field Sensors

Proceedings

Consani, Cristina¹  Tortschanoff, Andreas²  Ranacher, Christian³  Grille, Thomas⁴ 

[1] Author to whom correspondence should be addressed.;Carinthian Tech Research AG, 9524 Villach, Austria;Infineon Technologies Austria AG, 9500 Villach, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: silicon photonics;    mid-infrared sensing;    evanescent field sensor;    strip waveguide;   

DOI  :  10.3390/proceedings2130739

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present a detailed study of Si-based optical waveguides, which can be used as evanescent field sensors for the quantitative analysis of various gases and liquids. Direct quantitative comparison of simulation with experimental results of directional coupling structures allows fine-tuning the material parameters and provides important input for future sensor design.

【 授权许可】

CC BY