Large Out-of-Plane Deflection MEMS Actuators for Optical Applications

Proceedings

Torres, David¹  Dooley, Sarah²  Starman, LaVern A.³ 

[1] Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433, USA;Author to whom correspondence should be addressed.;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.

关键词: MEMS;    electrothermal actuator;    FEM;    optical scanning;   

DOI  :  10.3390/proceedings2131072

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The design and fabrication of an electrothermal MEMS actuation structure which is capable of producing large out-of-plane deflection is presented. The actuators are used to move a 1 mm2 mirror structure, where the large deflection allows one to achieve large beam steering angles. The electrothermal actuators are designed to operate via joule heating with a monolithically integrated heater. The proposed design was analyzed using finite element method simulation software (COMSOL 5.3a), to determine the thickness of each material layer, the initial out-of-plane upward deflections, the configuration of the heating element to achieve the desired actuation deformations, and the overall steady-state temperature distribution through the actuation structure due to Joule heating. Finally, the actuation assemblies were fabricated, released, tested and compared with our simulation results.

【 授权许可】

CC BY