On-Chip Temperature Compensation for Thermal Impedance Sensors

Proceedings

Pernau, Hans-Fridtjof¹  Jaegle, Martin²  Pfützner, Marcus³ 

[1] Author to whom correspondence should be addressed.;Fraunhofer Institute for Physical Measurement Techniques IPM, 79110 Freiburg, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: thermal impedance;    3-omega;    temperature compensation;   

DOI  :  10.3390/proceedings2131053

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Electrical impedance spectroscopy is a widespread characterization method for solids or fluids in industrial applications. We here report on its thermal equivalent, the “thermal impedance spectroscopy”, improved by using a temperature compensation method for temperature dependent thermal measurements using an on-chip reference resistor.

【 授权许可】

CC BY