Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation

Proceedings

Adorno, Silvia¹  Cerini, Fabrizio² 

[1] Author to whom correspondence should be addressed.;STMicroelectronics, Via Tolomeo 1, 20010 Cornaredo (MI), Italy

关键词: simulation platform;    MEMS microphones;    piezoelectric microphones;    multilayers piezoelectric MEMS;   

DOI  :  10.3390/proceedings2130862

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.

【 授权许可】

CC BY