Optimized Batch Process for Organic MEMS Devices

Proceedings

Teuschel, Marco¹  Hafner, Jonas²  Schrattenholzer, Jürgen³ 

[1] Author to whom correspondence should be addressed.;Institute of Sensor and Actuator Systems, TU Wien, 1040 Wien, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: flexible;    soft electronics;    micro-;    nanofabrication;    ferro-;    piezoelectricity;    organic materials;    polymers;    CMOS-process;   

DOI  :  10.3390/proceedings2130904

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Recently, organic electromechanical transducers have attracted intense scientific and technological interest due to their unique mechanical flexibility and their piezoelectric properties. However, the fabrication of organic MEMS devices is challenging. For example, a lift-off process cannot be used on polymers, because of the solvent in photoresists. Here, we present a straightforward and low-cost batch process for organic MEMS devices using standard micromachining techniques. As organic material we used the ferroelectric (co-)polymer poly(vinylidene fluoride-trifluorethylene) (P(VDF-TrFE)). The integration of the polymer in a CMOS-compatible process was optimized in terms of deposition and patterning of the polymer and the corresponding metal layers. Micromachined devices, such as capacitors and cantilevers, were fabricated and analysed. The ferroelectric perfomance was evaluated by electrical and electromechanical measurements. Our first results indicate that the proposed fabrication process is reliable resulting in well-functioning organic MEMS devices. We measured as piezoelectric constant a d33 of −32 pm/V with our organic P(VDF-TrFE) capacitors.

【 授权许可】

CC BY