CO2 gas sensitivity of sputtered zinc oxide thin films

Bulletin of Materials Science

关键词: Gas sensitivity;    ZnO;    sputtering;    XRD patterns;    structure;    thin films.;   

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

For the first time, sputtered zinc oxide (ZnO) thin films have been used as a CO2 gas sensor. Zinc oxide thin films have been synthesized using reactive d.c. sputtering method for gas sensor applications, in the deposition temperature range from 130–153°C at a chamber pressure of 8.5 mbar for 18 h. Argon and oxygen gases were used as sputtering and reactive gases, respectively. ZnO phase could be crystallized using a pure metal target of zinc. The structure of the films determined by means of X-ray diffraction method indicates that the zinc oxide single phase can be fabricated in this substrate temperature range. The sensitivity of the film synthesized at substrate temperature of 130°C is 2.17 in the presence of CO2 gas at a measuring temperature of 100°C.

【 授权许可】

CC BY