Investigation of the correlation between gas-sensitive properties and fractal dimension of nanostructured ZnO/ZnO films obtained by the sol-gel method

25th International Conference on Vacuum Technique and Technology

Yakushova, N.D.^1 ; Pronin, I.A.^1 ; Averin, I.A.^1 ; Karmanov, A.A.^1 ; Moshnikov, V.A.^1,2 ; Tz Dimitrov, D.^3

Department of Nano- and Microelectronics, Penza State University, Penza

440026, Russia^1

Department of Micro-and Nanoelectronics, Saint-Petersburg Electrotechnical University LETI, Saint-Petersburg

197376, Russia^2

Department of General and Inorganic Chemistry, University of Sofia, Sofia

1164, Bulgaria^3

关键词: Gas sensitive property;    Gas sensitivity;    Metal cation;    Nanostructured ZnO;    Thickness of the film;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012084/pdf
DOI  :  10.1088/1757-899X/387/1/012084

来源: IOP

【 摘 要 】

Correlations between gas sensitive properties and fractal dimension of nanostructured ZnO/ZnOfilms obtained by the sol-gel method are established. The thickness of the films and their fractal dimension were determined by the number of dives in the sol of the upper zinc oxide film, alloyed with metal cations. It was found out that in all cases larger values of the fractal dimension correspond to lower values of the gas sensitivity.