A Reversible Method to Characterize the Mass Sensitivity of a 3-Dof Mode Localized Coupled Resonator under Atmospheric Pressure

Proceedings

Wang, Yuan¹ 

关键词: MEMS;    micro-system;    mode-localized sensors;    coupled resonator sensors;    mass sensors;    bio-MEMS;   

DOI  :  10.3390/proceedings1040493

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatic coupled resonator was characterized under atmospheric pressure. A reversible method was used in which nanoparticles are added on and removed from one resonator of the 3-DOF coupled resonator system. Besides, a comparison of three mass sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results show that a 3-DOF mode localized coupled resonator has potential to be employed for biosensing applications.

【 授权许可】

CC BY