A Lorentz Force Actuated Continuous Deformable Polymer Mirror for Wavefront Control

Proceedings

Park, Byoungyoul¹ 

关键词: adaptive optics;    deformable polymer mirror (DPM);    microelectromechanical system (MEMS);    optical distortion;   

DOI  :  10.3390/proceedings1040554

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper describes MEMS deformable polymer mirror system for adaptive optics application. This system employs a 4 µm thick SU-8 membrane with a stress balanced double side aluminum coating as a mirror element. Underlying Lorentz actuators are used to control the surface topography of the mirror, enabling optical wavefront correction. Compared to electrostatic, piezoelectric, and thermal actuators, the Lorentz actuators offer low voltage drive (<1 V), high deflection, and bi-directional motion. Mirror deflection of up to 45 µm was demonstrated, with lower deflections of 10 µm achieved with actuator heating below 10 °C.

【 授权许可】

CC BY