MEMS mirror with slot structures suitable for flexible-grid WSS

IEICE Electronics Express

Keisuke Sorimoto³  Hitoshi Kawashima¹  Hiroyuki Tsuda³  Hisato Uetsuka²  Hiroshi Ishikawa¹  Masahiko Mori¹  Toshifumi Hasama¹ 

[1] National Institute of Advanced Industrial Science and Technology (AIST);Hitachi Cable, Ltd.;Graduate School of Science and Technology, Keio University

关键词: wavelength selective switch (WSS);    microelectromechanical system (MEMS);    flexible grid;    slot structure;   

DOI  :  10.1587/elex.10.20120924

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(9)We propose a microelectromechanical system (MEMS) mirror design, which is suitable for use in a flexible-grid wavelength selective switch (WSS). In the flexible grid operation with a conventional MEMS-based WSS, the diffraction loss at the inter-mirror gap regions caused a large ripple in the transmission spectra. On the other hand, the newly introduced slot structures in each mirror can reduce the ripples by intentionally attenuating the light on the mirrors to equalize the reflectance of the entire mirrors. We optimize the slot structure aiming for the flexible-grid WSS operation with a bandwidth-granularity of 12.5GHz. The ripples are successfully reduced to below 0.004dB with a loss penalty of only 1.05dB.

【 授权许可】

Unknown