A Novel Gyroscopic Actuation Concept for 2D MEMS Micromirrors

Proceedings

Kaupmann, Philip¹ 

关键词: MOEMS;    micromirror;    indirect actuation;    ansys;    transient simulation;   

DOI  :  10.3390/proceedings1040546

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

In this paper we present a novel approach to achieve indirect quasistatic deflection of 2D MEMS scanning micromirrors by solely resonant excitation utilizing gyroscopic effects. Therefore the micromirror is set to oscillate in its mirror plane additionally to its primary resonant oscillation with a similar frequency. According to angular momentum conservation this leads to a quasistatic deflection along a third axis orthogonal to the former. To investigate the applicability to MEMS micromirrors we develop a reference MEMS design to be used for fully transient FEM simulation. To achieve consistent simulation results we further develop a closed loop control algorithm. We then perform simulations using this method to prove the viability of the proposed concept

【 授权许可】

CC BY