Sensors | |
Integrated Optoelectronic Position Sensor for Scanning Micromirrors | |
Xiaoyang Zhang1  Huikai Xie1  Liang Zhou1  Yan Liu2  Lijun Zhu2  Xiang Cheng2  Xinglin Sun2  | |
[1] Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA;School of Aerospace Engineering, Xiamen University, Xiamen 361005, China; | |
关键词: QPD; MOEMS; position sensor; optoelectronic position sensor; MEMS mirror; micromirror; | |
DOI : 10.3390/s18040982 | |
来源: DOAJ |
【 摘 要 】
Scanning micromirrors have been used in a wide range of areas, but many of them do not have position sensing built in, which significantly limits their application space. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting angle of electrothermal MEMS (Micro-electromechanical Systems) scanning mirrors. The iOE-PS integrates a laser diode and its driving circuits, a quadrant photo-detector (QPD) and its readout circuits, and a band-gap reference all on a single chip, and it has been fabricated in a standard 0.5 μm CMOS (Complementary Metal Oxide Semiconductor) process. The footprint of the iOE-PS chip is 5 mm × 5 mm. Each quadrant of the QPD has a photosensitive area of 500 µm × 500 µm and the spacing between adjacent quadrants is 500 μm. The iOE-PS chip is simply packaged underneath of an electrothermally-actuated MEMS mirror. Experimental results show that the iOE-PS has a linear response when the MEMS mirror plate moves vertically between 2.0 mm and 3.0 mm over the iOE-PS chip or scans from −5 to +5°. Such MEMS scanning mirrors integrated with the iOE-PS can greatly reduce the complexity and cost of the MEMS mirrors-enabled modules and systems.
【 授权许可】
Unknown