Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

Proceedings

Xu, Jiushuai¹ 

关键词: MEMS;    Micro-cantilever;    ZnO nanorods;    seed layer;    environmental sensor;   

DOI  :  10.3390/proceedings1040290

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemical bath deposition (CBD) etc. This sensor shows a humidity sensitivity value of 6.35 ± 0.27 ppm/RH% at 25 °C in the range from 30% RH to 80% RH.

【 授权许可】

CC BY