Effect of the temperature variation on the hardness and microstructure of TiSiNO coatings obtained by sputtering

2018 3rd International Conference on Energy Materials and Applications

能源学;材料科学

Garcia-González, L.^1 ; López-Huerta, F.^2 ; Araujo-Pérez, D.J.^1 ; Zamora-Peredo, L.^1 ; Flores-Ramirez, N.^3 ; Vásquez Garcia, S.R.^4 ; Hernández Quiroz, T.^1 ; Hernández-Torres, J.^1

Centro de Investigación en Micro y Nanotecnologia, Universidad Veracruzana, Boca del Rio, Veracruz

94294, Mexico^1

Facultad de Ingenieria, Universidad Veracruzana, Boca del Rio, Veracruz

94294, Mexico^2

Facultad de Ingenieria en Tecnologia de la Madera, Universidad Michoacana de San Nicolás de Hidalgo, Michoacán, Morelia

58030, Mexico^3

Posgrado de Ingenieria Quimica, Universidad Michoacana de San Nicolás de Hidalgo, Michoacán, Morelia

58000, Mexico^4

关键词: Crystalline phasis;    Preferential orientation;    Reactive co-sputtering;    Silicon oxynitrides;    Stainless steel-304;    Substrate temperature;    Temperature variation;    Titanium oxide (TiO);   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/446/1/012001/pdf
DOI  :  10.1088/1757-899X/446/1/012001

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Titanium-Silicon Oxynitride (TiSiNO) coatings were synthetized by reactive co-sputtering technique on stainless steel 304 substrates varying the substrate temperature during the deposition. Two targets were used simultaneously, the first one of Ti on a DC source at 100 W and the second was a Ti-Si-O target on a pulsing RF source at 180 W. X-ray diffraction identified three crystalline phases: titanium nitride (TiN), titanium oxide (TiO) and silicon oxide (SiO2), where the SiO2 phase presented compressive stresses at low temperatures and tension stresses at higher temperatures, along with a change in the preferential orientation. The coating obtained at 200 C showed the higher hardness value of 14.8 GPa, attributed to a lower grain size and high compressive stress. Finally, all coatings presented high fracture toughness, since the was a lack of any type of crack for all applied load values.