Study of a variable deposition angle effect on the structure of Ti-Pb composite coatings

25th International Conference on Vacuum Technique and Technology

Lozovan, A.A.^1 ; Ya Betsofen, S.^1 ; Alexandrova, S.S.^1 ; Lyakhovetskiy, M.A.^1 ; Kubatina, E.P.^1

MAI, Moscow Aviation Institute (National Research University), Orshanskaya 3, Moscow

121552, Russia^1

关键词: Coating structures;    Cosputtering;    Deposition angle;    Different mechanisms;    Incidence angles;    Mosaic target;    Rotating substrates;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012049/pdf
DOI  :  10.1088/1757-899X/387/1/012049

来源: IOP

【 摘 要 】

The results of a study on a variable deposition angle effect on the structure of TiPb / TiPbN composite coatings sprayed on titanium alloy (VT6) substrates by magnetron sputtering are presented. The structures of coatings deposited on immobile and rotating substrates and obtained by co-sputtering a mosaic target of Ti and Pb are compared. It is shown that the differences in the incidence angles of the flow particles deposited on the substrates result in different mechanisms for coating structures formation.