Mass transfer of niobium and copper in binary systems obtained by magnetron sputtering

25th International Conference on Vacuum Technique and Technology

Postnikov, D.V.^1 ; Blesman, A.I.^1,2 ; Polonyankin, D.A.^1,2 ; Ibnoyaminova, S.L.^1 ; Teplouhov, A.A.^1

Physics Department, Omsk State Technical University (OmSTU), 11 Mira Avenue, Omsk

644050, Russia^1

Scientific-educational Resource Centre Nanotechnology, Omsk State Technical University (OmSTU), 11 Mira Avenue, Omsk

644050, Russia^2

关键词: Binary systems;    Concentration profiles;    Copper substrates;    Energy dispersive analysis;    Kinetic equations;    Low temperatures;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012060/pdf
DOI  :  10.1088/1757-899X/387/1/012060

来源: IOP

【 摘 要 】

This paper provides the mutual low-temperature mass transfer in binary systems obtained by magnetron sputtering of niobium onto a heated copper substrate. Based on the kinetic equation of diffusion, the distribution of the niobium through the substrate's depth at temperatures of 100, 200 and 300 °C is calculated. The method of calculating the concentration profiles of niobium, proposed in the manuscript, was verified using experimental data of energy-dispersive analysis.