Target heating in sputtering unit of magnetron

25th International Conference on Vacuum Technique and Technology

Kozin, A.A.^1

Department of Physical Electronics and Technology, Saint Petersburg Electro-technical University LETI, Saint Petersburg

197376, Russia^1

关键词: 3-d modeling;    Chromium targets;    Comsol multiphysics;    Magnetron discharges;    Metallic targets;    Running waters;    Target thickness;    Thermal process;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012043/pdf
DOI  :  10.1088/1757-899X/387/1/012043

来源: IOP

【 摘 要 】

The thermal process in a sputtering magnetron unit with a sandwich-target was stud-ied. The unit contains two targets located on the same axis. The inner target is effectively cooled by running water; the outer target is cooled through the fastening elements and by radia-tion. The study was performed by modeling in the COMSOL Multiphysics using the Heat Transfer Module. A 3D-model of the sputtering unit has been developed in order to thoroughly analyze the thermal processes in a unit with a cold chromium target and a hot titanium one. The influence of the target thickness and magnetron discharge power on the outer target tempera-ture is found. The model can be used to study a magnetron with any metallic target.