25th International Conference on Vacuum Technique and Technology | |
Target heating in sputtering unit of magnetron | |
Kozin, A.A.^1 | |
Department of Physical Electronics and Technology, Saint Petersburg Electro-technical University LETI, Saint Petersburg | |
197376, Russia^1 | |
关键词: 3-d modeling; Chromium targets; Comsol multiphysics; Magnetron discharges; Metallic targets; Running waters; Target thickness; Thermal process; | |
Others : https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012043/pdf DOI : 10.1088/1757-899X/387/1/012043 |
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来源: IOP | |
【 摘 要 】
The thermal process in a sputtering magnetron unit with a sandwich-target was stud-ied. The unit contains two targets located on the same axis. The inner target is effectively cooled by running water; the outer target is cooled through the fastening elements and by radia-tion. The study was performed by modeling in the COMSOL Multiphysics using the Heat Transfer Module. A 3D-model of the sputtering unit has been developed in order to thoroughly analyze the thermal processes in a unit with a cold chromium target and a hot titanium one. The influence of the target thickness and magnetron discharge power on the outer target tempera-ture is found. The model can be used to study a magnetron with any metallic target.
【 预 览 】
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Target heating in sputtering unit of magnetron | 476KB | download |