Magnetron sputtering of copper on thermosensitive polymer materials of the gas centrifuge rotors

International Workshop on Physical and Chemical Processes in Atomic Systems

Borisevich, V.^1,2 ; Senchenkov, S.^1,2 ; Titov, D.^1,2

National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe highway 31, Moscow

115409, Russia^1

National Research Centre kurchatov Institute, ac. Kurchatov square, 1, Moscow

123098, Russia^2

关键词: Deposition technique;    Experimental development;    Independent research;    Magnetron discharges;    Non-stationary model;    Operating parameters;    Quantitative agreement;    Thermo-sensitive polymer;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/751/1/012013/pdf
DOI  :  10.1088/1742-6596/751/1/012013

来源: IOP

【 摘 要 】

Magnetron sputtering is the well-known and widely-used deposition technique for coating versatile high-quality and well-adhered films. However, the technology has some limitations, caused by high temperatures on the coating surface. The paper is devoted to the experimental development of a process of magnetron sputtering of copper on a surface coated with a thermosensitive polymer made of carbon fiber with epoxide binder. This process is applied for balancing a rotor of a gas centrifuge for isotope separation. The optimum operating parameters of the process are found and discussed. They were in quantitative agreement with data obtained by means of non-stationary modeling based on a global description of plasma in the typical geometry of the magnetron discharges obtained in independent research. The structure of the resulting layer is investigated.