International Workshop on Physical and Chemical Processes in Atomic Systems | |
Magnetron sputtering of copper on thermosensitive polymer materials of the gas centrifuge rotors | |
Borisevich, V.^1,2 ; Senchenkov, S.^1,2 ; Titov, D.^1,2 | |
National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe highway 31, Moscow | |
115409, Russia^1 | |
National Research Centre kurchatov Institute, ac. Kurchatov square, 1, Moscow | |
123098, Russia^2 | |
关键词: Deposition technique; Experimental development; Independent research; Magnetron discharges; Non-stationary model; Operating parameters; Quantitative agreement; Thermo-sensitive polymer; | |
Others : https://iopscience.iop.org/article/10.1088/1742-6596/751/1/012013/pdf DOI : 10.1088/1742-6596/751/1/012013 |
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来源: IOP | |
【 摘 要 】
Magnetron sputtering is the well-known and widely-used deposition technique for coating versatile high-quality and well-adhered films. However, the technology has some limitations, caused by high temperatures on the coating surface. The paper is devoted to the experimental development of a process of magnetron sputtering of copper on a surface coated with a thermosensitive polymer made of carbon fiber with epoxide binder. This process is applied for balancing a rotor of a gas centrifuge for isotope separation. The optimum operating parameters of the process are found and discussed. They were in quantitative agreement with data obtained by means of non-stationary modeling based on a global description of plasma in the typical geometry of the magnetron discharges obtained in independent research. The structure of the resulting layer is investigated.
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