Possibility of measuring range extension of growing thin films thickness control, based on surface plasmon resonance effect

25th International Conference on Vacuum Technique and Technology

Komlev, A.E.^1 ; Babinova, R.V.^1 ; Dyukin, R.V.^1

St. Petersburg Electrotechnical University LETI, St. Petersburg

197376, Russia^1

关键词: Excitation angles;    High resolution;    Measuring ranges;    Nanoscale films;    Real time;    Surface electromagnetic waves;    Surface plasmon resonance effects;    Thin films-thickness;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012039/pdf
DOI  :  10.1088/1757-899X/387/1/012039

来源: IOP

【 摘 要 】

Dependence of excitation angle of surface electromagnetic waves on HfO2 film thickness was investigated. Modeling for different wavelengths showed the method's applicability for real-time and high-resolution film thickness control. Proposed method can be used for development of fundamentally new nanoscale films thickness control systems.