The influence of weak impacts on certain processes of nanotechnology

24th International Conference on Vacuum Technique and Technology

Tupik, V.A.^1 ; Margolin, V.I.^1 ; Potekhin, M.S.^1

Department of Radio Microelectronics and Radio Equipment Technology, Electrotechnical University, LETI, Saint Petersburg

197376, Russia^1

关键词: Complex shapes;    Diffraction fields;    Fractal films;    Nanoscale films;    Technological process;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012031/pdf
DOI  :  10.1088/1742-6596/872/1/012031

来源: IOP

【 摘 要 】

The article deals with the influence of weak and super weak impacts on certain technological processes in nanotechnology related to the synthesis of nanoscale films and coatings. We also touch upon the impacts of weak diffraction fields of complex shape on the formation of fractal films and coatings.