Preparation of MgB2 superconducting microbridges by focused ion beam direct milling

1st International Conference on New Material and Chemical Industry

材料科学;化学工业

Zhang, Xuena^1,2 ; Li, Yanli^1,2 ; Xu, Zhuang^3 ; Kong, Xiangdong^1 ; Han, Li^1

Department of Institute of Electrical Engineering, Chinese Academy of Sciences, China^1

University of Chinese Academy of Sciences, China^2

LanZhou University, China^3

关键词: Direct milling;    Experimental parameters;    FIB milling;    Ion damage;    MgB2 films;    Microbridges;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/167/1/012071/pdf
DOI  :  10.1088/1757-899X/167/1/012071

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

MgB2superconducting microbridges were prepared by focused ion beam (FIB) direct milling on MgB2films. The surface topography of the microbridges were observed using SEM and AFM and the superconductivity was measured in this paper. Lots of cracks and holes were found near the milled area. And the superconducting transition temperature was decreased a lot and the bridges prepared were not superconducting due to ion damage after milled with large dose. Through these works, we explored the effect regular of FIB milling and experimental parameters on the performance of microbridges.