Investigation of quantum efficiency of A3B5 laser heterostructure after FIB milling

18th International Conference PhysicA.SPb

Mitrofanov, M.I.^1 ; Evtikhiev, V.P.^2

St.Petersburg Polytechnic University, 29 Politekhnicheskaya, St-Petersburg

195251, Russia^1

Ioffe Institute, 26 Politekhnicheskaya, St-Petersburg

194021, Russia^2

关键词: FIB milling;    Oxidization;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/769/1/012048/pdf
DOI  :  10.1088/1742-6596/769/1/012048

来源: IOP

【 摘 要 】

Al-containing layers oxidization was eliminated using UHV FIB system and thus, only ion implantation and amorphisation influence on quantum efficiency of A3B5 laser heterostructures should be investigated.