Thin coatings and films hardness evaluation

1st International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies"

无线电电子学

Matyunin, V.M.^1 ; Marchenkov, A.Yu.^1 ; Demidov, A.N.^1 ; Karimbekov, M.A.^1

Moscow Power Engineering Institute, Krasnokazarmennaya st. 14, Moscow

111250, Russia^1

关键词: Coating-substrate;    Composite hardness;    Evaluation methods;    Experimental verification;    Hardness values;    Scale Factor;    Scale levels;    Substrate hardness;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/151/1/012030/pdf
DOI  :  10.1088/1757-899X/151/1/012030

来源: IOP

【 摘 要 】

The existing thin coatings and films hardness evaluation methods based on indentation with pyramidal indenter on various scale levels are expounded. The impact of scale factor on hardness values is performed. The experimental verification of several existing hardness evaluation methods regarding the substrate hardness value and the "coating - substrate" composite hardness value is made.