Investigation of thin film deposition on stainless steel 304 substrates under different operating conditions

2nd International Manufacturing Engineering Conference; 3rd Asia-Pacific Conference on Manufacturing Systems

Chowdhury, M.A.^1 ; Nuruzzaman, D.M.^2

Department of Mechanical Engineering, Dhaka University of Engineering and Technology, Gazipur, Bangladesh^1

Faculty of Manufacturing Engineering, University Malaysia Pahang, Malaysia^2

关键词: Deposition durations;    Different operating conditions;    Friction and wear;    Friction coefficients;    Sliding velocities;    Stainless steel-304;    Thermal chemical vapor deposition;    Thin-film depositions;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/114/1/012029/pdf
DOI  :  10.1088/1757-899X/114/1/012029

来源: IOP

【 摘 要 】

In recent times, friction and wear in relation to the deposited carbon films on the steel substrates are important issues for industrial applications. In this research study, solid thin films were deposited on the stainless steel 304 (SS 304) substrates under different operating conditions. In the experiments, natural gas (97.14% methane) was used as a precursor gas in a hot filament thermal chemical vapor deposition (CVD) reactor. Deposition rates on SS 304 substrates were investigated under gas flow rates 0.5 - 3.0 l/min, pressure 20 - 50 torr, gap between activation heater and substrate 3.0 - 6.0 mm and deposition duration 30 - 120 minutes. The obtained results show that there are significant effects of these parameters on the deposition rates on SS 304 within the observed range. Friction coefficient of SS 304 sliding against SS 314 was also investigated under normal loads 5 - 10 N and sliding velocities 0.5 - m/s before and after deposition. The experimental results reveal that in general, frictional values are lower after deposition than that of before deposition.