Structural, electrical and optical characteristics of Al-doped zinc oxide thin films deposited by reactive magnetron sputtering

International Conference on Functional Materials and Nanotechnologies 2013

材料科学;物理学

Zubkins, M.^1 ; Kalendarev, R.^1 ; Vilnis, K.^1 ; Azens, A.^1 ; Purans, J.^1

Institute of Solid State Physics, University of Latvia, Riga, Latvia^1

关键词: Al-doped zinc oxide;    C-axis orientations;    DC reactive magnetron sputtering;    Electrical and optical properties;    Optical characteristics;    Polycrystalline;    Reactive magnetron sputtering;    Substrate temperature;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/49/1/012057/pdf
DOI  :  10.1088/1757-899X/49/1/012057

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

ZnO:Al (AZO) thin films on glass were deposited by DC reactive magnetron sputtering at approximately 300°C substrate temperature. Structural, electrical and optical properties were investigated as a function of oxygen flow. XRD data shows that AZO thin films are polycrystalline with pronounced c-axis orientation and the grain size increasing with the oxygen flow. The lowest achieved resistivity within the deposited set of samples was 7.6·10-4Ωcm The transmittance of AZO films was above 80 % at 550 run with the optical band gap between 3.4 and 3.8 eV.