Tuning electrical properties of hierarchically assembled Al-doped ZnO nanoforests by room temperature Pulsed Laser Deposition

THIN SOLID FILMS

卷:594

Article

Gondoni, P.^1,2  Mazzolini, P.^1,2,3  Russo, V.^1,2  Diani, M.^1,2  Amati, M.⁴  Gregoratti, L.⁴  De Renzi, V.⁵  Gazzadi, G. C.⁶  Marti-Rujas, J.³  Li Bassi, A.^1,2,3  Casari, C. S.^1,2,3 

[1] Politecn Milan, Dipartimento Energia, I-20133 Milan, Italy

[2] Politecn Milan, NEMAS Ctr NanoEngn Mat & Surfaces, I-20133 Milan, Italy

[3] Ist Italiano Tecnol, Ctr Nano Sci & Technol Polimi, I-20133 Milan, Italy

[4] Elettra Sincrotrone Trieste SCpA, I-34149 Trieste, Italy

[5] Univ Modena & Reggio Emilia, Dipartimento Sci Fis Informat & Matemat, Reggio Emilia, Italy

[6] CNR Inst Nanosci S3, I-41100 Modena, Italy

关键词: Al-doped zinc oxide;    Transparent conducting oxides;    Hierarchical nanostructures;    Electrical conduction;    Light scattering;    Pulsed Laser Deposition;   

DOI  :  10.1016/j.tsf.2015.09.066

来源: Elsevier

【 摘 要 】

Large surface area, 3D structured transparent electrodes with effective light management capability may represent a key component in the development of new generation optoelectronic and energy harvesting devices. We present an approach to obtain forest-like nanoporous/hierarchical Al-doped ZnO conducting layers with tunable transparency and light scattering properties, by means of room temperature Pulsed Laser Deposition in a mixed Ar:O-2 atmosphere. The composition of the background atmosphere during deposition can be varied to modify stoichiometry-related defects, and therefore achieve control of electrical and optical properties, while the total background pressure controls thematerial morphology at the nano-and mesoscale and thus the light scattering properties. This approach allows tuning electrical resistivity over a very wide range (10(-1)-10(6) Omega cm), both in the in-plane and cross-plane directions. Optical transparency and haze can also be tuned by varying the stoichiometry and thickness of the nano-forests. (C) 2015 Elsevier B.V. All rights reserved.

【 授权许可】

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