Effect of the lead oxide content on the microstructure and properties of PZT films obtained by RF magnetron sputtering

24th International Conference on Vacuum Technique and Technology

Mukhin, N.V.^1 ; Chigirev, D.A.^1

St. Petersburg State Electrotechnical University, LETI, ul. Prof. Popova 5, St. Petersburg

197376, Russia^1

关键词: Ferroelectric property;    Heterophase structures;    High frequency HF;    Magnetron sputtering method;    Microstructure and properties;    Perovskite structures;    Polycrystalline PZT films;    rf-Magnetron sputtering;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012045/pdf
DOI  :  10.1088/1742-6596/872/1/012045

来源: IOP

【 摘 要 】

Experimental studies of the influence of lead oxide as well as temperature and time of heat treatment on the microstructure and ferroelectric properties of PZT films obtained by the high-frequency magnetron sputtering method were carried out. It is shown that the change in the ferroelectric properties of polycrystalline PZT films can be explained by their heterophase structure with inclusions of lead oxide. It was found that the presence of a sublayer of lead oxide leads to a self-polarization of the film of the PZT. During the formation of the perovskite structure, the diffusion of lead oxide to the surface of the film occurs more intensively than after its formation.