Formation of optically transparent nanocomposite protective coatings on glass produced by ionic implantation and magnetron sputtering methods for space applications

13th International Conference on Films and Coatings

Sergeev, V.P.^1,2 ; Kalashnikov, M.P.^1,2 ; Bozhko, I.A.^1,2 ; Rybalko, E.V.^1 ; Sergeev, O.V.^1 ; Voronov, A.V.^1 ; Fedorischeva, M.V.^1,2

Institute of Strength Physics and Materials Science, SB RAS, Tomsk

634055, Russia^1

National Research Tomsk Polytechnic University, Tomsk

634050, Russia^2

关键词: Electron probe analysis;    Elemental compositions;    Ionic implantation;    Iron micro-particles;    Magnetron deposition;    Magnetron sputtering method;    Optically transparent nanocomposites;    Structural-phase state;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/857/1/012038/pdf
DOI  :  10.1088/1742-6596/857/1/012038

来源: IOP

【 摘 要 】

The purpose of this research is design of a magnetron deposition technology for quartz glasses of optically transparent nanocomposite protective coatings based on Al-Si-N with preliminary modification of the substrate surface by a high-energy Ni+ion beam. The coating improves the mechanical properties and resistance of the glass to the impact of highspeed iron microparticles. The structural-phase state and elemental composition of the coatings and the surface layer of the substrate are investigated by electron microscopy, electron-probe analysis, and secondary ion mass spectrometry.