Estimate of the concentration of implanted ions in solid substrates using a web application

Workshop on Processing Physic-Chemistry Advanced

物理学;化学

Vera Rivera, F.H.^1,2 ; Pérez Gutiérrez, B.R.^2 ; Dulce-Moreno, H.J.^1,2 ; Duran-Flórez, F.^4 ; Niño, E.D.V.^1,3,5

Foundation of Researchers in Science and Technology of Materials, Colombia^1

Universidad Francisco de Paula Santander, San-José de Cucuta, Colombia^2

Universidad Industrial de Santander, Bucaramanga, Colombia^3

Universidad Pontificia Bolivariana, Bucaramanga, Colombia^4

Universidad Politécnica de Madrid, Madrid, Spain^5

关键词: Experimental parameters;    Functional elements;    Implanted ions;    Ionic implantation;    Low pressures;    Solid substrates;    Treatment techniques;    WEB application;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/743/1/012016/pdf
DOI  :  10.1088/1742-6596/743/1/012016

来源: IOP

【 摘 要 】

The three-dimensional ionic implantation technique (3DII) is used to modify the surface of solid metal by electric discharges pulsed of high voltage at low pressures. Knowing the density of ions implanted in the surface of a functional element, in a faster and estimated way, will help to optimize the surface treatment technique. Therefore, a web application was developed which from experimental parameters established in a process 3DII estimates the concentration of ions implanted in solid metal substrates. The results obtained in this research work demonstrate the feasibility of the computational web tool to perfect the experiments of surface modification by ion implantation.