Processing of metallization technology aluminum oxide ceramics for electro-vacuum devices elements and power electronics devices

24th International Conference on Vacuum Technique and Technology

Kolesnik, L.L.^1 ; Zhuleva, T.S.^1 ; Predtechenskiy, P.O.^1 ; Hlaing, Myo Kyaw^1 ; Aung, Zaw Phyo^1

Bauman Moscow State Technical University, Department of Electronic Engineering Technologies, 2nd Baumanskaya str. 5, bld. 1, Moscow

105005, Russia^1

关键词: Aluminum oxide substrates;    Electro-vacuum devices;    Metallization technology;    Power electronics devices;    Titanium film;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012018/pdf
DOI  :  10.1088/1742-6596/872/1/012018

来源: IOP

【 摘 要 】

In this journal are considered the results of processing titanium film deposition technology on the aluminum oxide substrate. The results of measuring the characteristics of adhesives are given.