The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode

5th International Congress on Energy Fluxes and Radiation Effects 2016

Linnik, S.A.^1 ; Gaydaychuk, A.V.^1 ; Okhotnikov, V.V.^1

National Research Tomsk Polytechnic University, 30, Lenin Avenue, Tomsk

634050, Russia^1

关键词: Abnormal glow discharge;    CVD diamond coatings;    Deposited films;    Diamond film deposition;    Discharge systems;    Plasma filaments;    Polycrystalline diamond coatings;    Repetitively pulsed mode;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/830/1/012118/pdf
DOI  :  10.1088/1742-6596/830/1/012118

来源: IOP

【 摘 要 】

We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries.