Influence of microstructure and surface topography on the electrical conductivity of Cu and Ag thin films obtained by magnetron sputtering

5th International Congress on Energy Fluxes and Radiation Effects 2016

Polonyankin, D.A.^1 ; Blesman, A.I.^1 ; Postnikov, D.V.^1

Omsk State Technical University (OmSTU), 11 Mira Avenue, Omsk

644050, Russia^1

关键词: Conductive thin films;    Electrical and optical properties;    Electrical conductivity;    Energy saving coatings;    Grain boundary conductivity;    Industrial production;    Laser interference microscopies;    Specific conductivity;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/830/1/012112/pdf
DOI  :  10.1088/1742-6596/830/1/012112

来源: IOP

【 摘 要 】

Conductive thin films formation by copper and silver magnetron sputtering is one of high technological areas for industrial production of solar energy converters, energy-saving coatings, flat panel displays and touch control panels because of their high electrical and optical properties. Surface roughness and porosity, average grain size, internal stresses, orientation and crystal lattice type, the crystallinity degree are the main physical properties of metal films affecting their electrical resistivity and conductivity. Depending on the film thickness, the dominant conduction mechanism can affect bulk conductivity due to the flow of electron gas, and grain boundary conductivity. The present investigation assesses the effect of microstructure and surface topography on the electrical conductivity of magnetron sputtered Cu and Ag thin films using X-ray diffraction analysis, scanning electron and laser interference microscopy. The highest specific conductivity (78.3 MS m-1and 84.2 MS m-1, respectively, for copper and silver films at the thickness of 350 nm) were obtained with the minimum values of roughness and grain size as well as a high degree of lattice structuredness.