Investigation on the Evolution of Structural, Electrical and Transmitting Properties of Aluminium Doped Zinc Oxide Thin Film as a function of substrate temperature

International Conference on Advances in Materials and Manufacturing Applications 2016

Devasia, Sebin^1 ; Athma, P.V.^1,2 ; Jose, Anumol^3 ; Anila, E.I.^1

Optoelectronic and Nanomaterials' Research Lab, Department of Physics, Union Christian College Aluva, Kerala

683 102, India^1

Department of Physics, SNM College Maliankara, Kerala

683 516, India^2

Department of Botany, U C College, Aluva, Kerala

683102, India^3

关键词: Chemical spray pyrolysis;    Electrical and optical properties;    Electrical conductivity;    Four point probe;    Four-point probe measurements;    Lower temperatures;    Substrate temperature;    Various substrates;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/149/1/012077/pdf
DOI  :  10.1088/1757-899X/149/1/012077

来源: IOP

【 摘 要 】

Improved electrical conductivity of aluminium doped zinc oxide (AZO) thin films deposited by chemical spray pyrolysis method at various substrate temperatures is reported. Detailed investigation on the structural, electrical and optical properties were carried out using XRD, four point probe and UV-Vis-NIR measurements. The films deposited at 450 °C shows better conductivity and transparency as compared to the films grown at lower temperatures. Electrical conductivity, determined using four point probe measurements, is 6.271 × 102μcm with an average transmittance of 70 % in the visible and IR region.