Energy & mass-charge distribution peculiarities of ion emitted from penning source

5th International Congress on Energy Fluxes and Radiation Effects 2016

Mamedov, N.V.^1 ; Kolodko, D.V.^2 ; Sorokin, I.A.^2 ; Kanshin, I.A.^1 ; Sinelnikov, D.N.^2

Federal State Unitary Enterprise, All-Russian Research Institute of Automatics N.a. N.L. Dukhov, Sushchevskaya st. 22, Moscow

127055, Russia^1

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 31 Kashirskoe sh., Moscow

115409, Russia^2

关键词: Anode potential;    Atomic hydrogen;    Charge composition;    Discharge currents;    Ion distributions;    Mass charge distribution;    Penning ion source;    Plasma chemical processing;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/830/1/012063/pdf
DOI  :  10.1088/1742-6596/830/1/012063

来源: IOP

【 摘 要 】

The optimization of hydrogen Penning sources used, in particular, in plasma chemical processing of materials and DLC deposition, is still very important. Investigations of mass-charge composition of these ion source emitted beams are particular relevant for miniature linear accelerators (neutron flux generators) nowadays. The Penning ion source energy and mass-charge ion distributions are presented. The relation between the discharge current abrupt jumps with increasing plasma density in the discharge center and increasing potential whipping (up to 50% of the anode voltage) is shown. Also the energy spectra in the discharge different modes as the pressure and anode potential functions are presented. It has been revealed that the atomic hydrogen ion concentration is about 5-10%, and it weakly depends on the pressure and the discharge current (in the investigated range from 1 to 10 mTorr and from 50 to 1000 μA) and increases with the anode voltage (up 1 to 3,5 kV).