Thickness measurements of coatings formed from metal plasma of a vacuum arc discharge using X-ray radiation

3rd International Conference on X-ray Technique

Lisenkov, A.A.^1 ; Martsinukov, S.A.^2 ; Chernigovskiy, V.V.^2 ; Kostrin, D.K.^2 ; Smirnov, E.A.^2

Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, Saint-Petersburg

199178, Russia^1

Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University LETI, Saint-Petersburg

197376, Russia^2

关键词: Broad spectrum;    Coating thickness;    Functional properties;    Metal plasma;    Vacuum arc discharges;    Vacuum arc plasma sources;    X ray radiation;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/808/1/012005/pdf
DOI  :  10.1088/1742-6596/808/1/012005

来源: IOP

【 摘 要 】

Using vacuum arc plasma sources allows obtaining coatings with broad spectrum of functional properties. The main problem is to control the thickness of a formed coating. This paper shows the possibility of using X-ray radiation to determine the coating thickness.