Formation of coatings from the flow of metal plasma of a vacuum-arc discharge

25th International Conference on Vacuum Technique and Technology

Rikov, A.A.^1 ; Yurchenkov, M.I.^1 ; Lisenkov, A.A.^1 ; Kostrin, D.K.^1

Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University LETI, Saint Petersburg

197376, Russia^1

关键词: Cold cathodes;    Metal plasma;    Multi-component coatings;    OR applications;    Vacuum arc discharges;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012066/pdf
DOI  :  10.1088/1757-899X/387/1/012066

来源: IOP

【 摘 要 】

Modification of the surface properties of a material or application of a protective coating are the most effective ways to improve the service life and reliability of parts. For the production of coatings vacuum-arc discharge with integrally cold cathode is widely used. The advantages of this method are high degree of purity of the coating, the possibility of changing the structure of the coating and obtain complex multicomponent coatings. In this paper, we consider the production of anti-emission coating based on titanium; the results of metallographic studies of this coating are presented.