Wear and Corrosion properties of CrSiCN coatings deposited by cathodic arc deposition process

2nd International Conference on Materials Engineering and Nano Sciences

材料科学;物理学

Yang, C.H.^1 ; Chen, C.Y.^1 ; Ho, W.Y.^1

Department of Materials and Energy Engineering, MingDao University, 369 Wen-Hua Rd., Petow, ChungHua

523, Taiwan^1

关键词: Cathodic arc deposition;    Coefficient of frictions;    Corrosion property;    Metal plasma;    Reactive gas;    Smooth surface;    Tribological tests;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/378/1/012012/pdf
DOI  :  10.1088/1757-899X/378/1/012012

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

In this study, three CrSiN based coatings were fabricated using cathodic arc deposition (CAD) technique. CrSiCN coatings were obtained by using metal plasma activated CAD process to decompose the C2H2 and N2 reactive gas. The analyzed CrSiCN coatings were obtained with higher hardness and smooth surface. With addition of Si (8.7 at.% ) and C (41 at.%) in the coatings, the hardness increased to Hv3300 which is resulted from the addition of CrCN and CNx new phases. Tribological test shows the coefficient of friction of CrSiCN down to 0.2 was observed with the addition of Si and C, related to hardness and smooth surface. However, the corrosion resistance of the CrSiN coating is better than that of CrSiCN coating in the 1M H2SO4 solution at room temperature.