Gas dynamic characteristics of glow discharge chamber for functional coating deposition.

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Israphilov, D.I.^1

Kazan Federal University, Russia^1

关键词: Coating deposition;    Discharge chamber;    Dynamic characteristics;    Functional coating;    In-vacuum;    Low pressures;    Supersonic gas flows;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012023/pdf
DOI  :  10.1088/1742-6596/789/1/012023

来源: IOP

【 摘 要 】

In article shown conditions of glow discharge existence at low pressures. Described possibility of organizing glow discharge at very low pressures due to the supersonic gas flow in a limited area of the discharge chamber. Procedure of supersonic flow regime calculating in vacuum chamber for coating deposition shown.