Evaluation of the effectiveness of the use of arc plasma generator with distributed parameters for the deposition of functional coatings at low pressures.

7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation

Kashapov, N.F.^1 ; Yu Dautov, G.^2 ; Dautov, I.G.^1,2 ; Zakirova, G.R.^1

Kazan Federal University, Russia^1

Kazan National Research Technical University Named after A. N. Tupolev, Russia^2

关键词: Arc plasma;    Distributed parameter;    Electrode erosion;    Functional coating;    Low pressures;    Nonequilibrium plasmas;    Plasma treatment;    Plasmatrons;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012006/pdf
DOI  :  10.1088/1742-6596/669/1/012006

来源: IOP

【 摘 要 】

The estimation of the mean mass enthalpy at the outlet of the plasmatron with distributed parameters. Non-equilibrium plasma at low pressures allows to combine the processes of plasma treatment and sputtering. It is necessary to consider the influence of electrode erosion.