Capacitive coupled RF discharge: modelling at the local statement of the problem

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Badriev, I.B.^1 ; Chebakova, V. Yu^1 ; Zheltukhin, V.S.^2

Kazan Federal University, 18 Kremlevskaya Street, Kazan

420008, Russia^1

Kazan State Technological University, 68 Karl Marx Street, Kazan

420015, Russia^2

关键词: Capacitively coupled RF discharge;    Interelectrode distance;    Local approximation;    Model adequacy;    Model problems;    Numerical calculation;    Numerical experiments;    RF discharge;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012004/pdf
DOI  :  10.1088/1742-6596/789/1/012004

来源: IOP

【 摘 要 】

In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other authors, in particular, with the experimental data, is demonstrated as well a model adequacy as effectiveness of the numerical method. A results of calculations of the model problem at pressure of 760 Torr, frequency of generator of 13.76 MHz and interelectrode distance of 20mm, in local approximation are presented.