The magnetic field application for the gas discharge plasma control in processes of surface coating and modification

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Asadullin, T. Ya^1 ; Galeev, I.G.^1

General Physics Department, Kazan National Research Technical University - KAI, 10, K. Marx St, Kazan

420111, Russia^1

关键词: Computer managements;    Distribution management;    Distribution of plasma parameters;    Gas-discharge plasmas;    Irregular shape;    Process parameters;    Surface coatings;    Three-dimensional spatial structures;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012003/pdf
DOI  :  10.1088/1742-6596/789/1/012003

来源: IOP

【 摘 要 】

In this paper the method of magnetic field application to control the gas discharge plasma effect on the various surfaces in processes of surface coating and modification is considered. The magnetic field directed perpendicular to the direction of electric current in the gas discharge plasma channel is capable to reject this plasma channel due to action of Lorentz force on the moving electrically charged particles [1,2]. The three-dimensional spatial structure of magnetic field is created by system of necessary quantity of the magnets located perpendicular to the direction of course of electric current in the gas-discharge plasma channel. The formation of necessary spatial distribution of magnetic field makes possible to obtain a required distribution of plasma parameters near the processed surfaces. This way of the plasma channel parameters spatial distribution management is the most suitable for application in processes of plasma impact on a surface of irregular shape and in cases when the selective impact of plasma on a part of a surface of a product is required. It is necessary to apply automated computer management of the process parameters [3] to the most effective plasma impact.