Modelling emission spectra of the gas-discharge plasma for the aims of its analysis and parameters estimation

24th International Conference on Vacuum Technique and Technology

Kostrin, D.K.^1 ; Lisenkov, A.A.^2 ; Uhov, A.A.^1 ; Ramazanov, A.N.^1

Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University, LETI, Saint Petersburg

197376, Russia^1

Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, Saint Petersburg

199178, Russia^2

关键词: Coating deposition;    Electronic transition;    Emission spectrums;    Gas-discharge plasmas;    Local thermodynamic equilibrium;    Parameters estimation;    Plasma composition;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012055/pdf
DOI  :  10.1088/1742-6596/872/1/012055

来源: IOP

【 摘 要 】

In this paper modelling of the emission spectra of gas-discharge plasma using the data about the electronic transitions in substances under the assumption of local thermodynamic equilibrium is discussed. The possibility of using these spectra to simplify the analysis of the plasma composition during the coating deposition process and determine the parameters of the gas-discharge plasma are shown.