Modelling of local ion nitriding in a glow discharge with hollow cathode

5th International Congress on Energy Fluxes and Radiation Effects 2016

Budilov, V.^1 ; Ramazanov, K.^1 ; Khusainov, Yu.^1

Ufa State Aviation Technical University, Department of Mechanical Engineering, 12 K. Marx Str., Ufa, Russia^1

关键词: Computer calculation;    Computer modeling;    Diffusion layers;    Diffusion process;    Distribution of plasma parameters;    Glow discharge plasmas;    Hollow cathode effect;    Plasma parameter;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/830/1/012073/pdf
DOI  :  10.1088/1742-6596/830/1/012073

来源: IOP

【 摘 要 】

The paper presents the results of computer calculations of glow discharge plasma parameters in a hollow cathode zone and modeling of thermal and diffusion processes at local ion nitriding with a hollow cathode. The proposed model of a glow discharge with a hollow cathode with sufficient accuracy allowed to describe the distribution of plasma parameters in a cathode void. Values of plasma parameters in a cathode void formed by a mesh screen and cathode surface were obtained via the probe method. It was found that the use of hollow cathode effect allows to increase the concentration of ions near the treated surface by 1.5 times. The suggested computer model allows to predict the distribution of the temperature field and depth of a diffusion layer at local ion nitriding with a hollow cathode for various configurations and sizes.