Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Johannisson, Pontus^1 ; Ohlsson, Fredrik^1 ; Rusu, Cristina^1

Acreo Swedish ICT AB, Arvid Hedvalls Backe 4, Gothenburg

SE-411 33, Sweden^1

关键词: Energy Harvester;    Etching process;    Manufacturing process;    Multi-Axis;    Piezoelectric energy harvesting;    Proof mass;    Slanted beams;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012080/pdf
DOI  :  10.1088/1742-6596/773/1/012080

来源: IOP

【 摘 要 】

During the manufacturing of MEMS components, slanted beams can be produced in the etching process. We show that this can be used to produce skew motion that causes deflection of a proof mass out of the device plane also when the excitation is confined to the device plane. This allows construction of an energy harvester that uses a planar manufacturing process and produces power also with in-plane excitation. To obtain this with traditional methods it would be necessary to manufacture separate components and then mount them with their sensitive axes orthogonal to each other.