Photoelectric-Charging-Enhanced MEMS Electret Energy Harvester with Vacuum Packaging

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Kim, Seonwoo^1 ; Suzuki, Yuji^1

Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo

113-8656, Japan^1

关键词: Comb drive;    Energy Harvester;    Output power;    UV irradiation;    Vacuum package;    Vacuum packaging;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012012/pdf
DOI  :  10.1088/1742-6596/773/1/012012

来源: IOP

【 摘 要 】

A novel MEMS electret energy harvester charged with UV light after sealed in a vacuum package is proposed. By 265 nm UV irradiation, electrons are generated inside the package through the photoelectric effect. Uniform surface potential on sidewalls of the comb drives has been obtained. With a MEMS electret generator in a 60 Pa package, 2.28 μW has been obtained at 1 g and 740 Hz, which is 10 times higher than the output power at the atmospheric pressure.