Nitride Nanowires: From Rigid to Flexible Piezo-generators

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Lu, L.^1 ; Jamond, N.^2 ; Chrétien, P.^3 ; Houzé, F.^3 ; Travers, L.^2 ; Harmand, J.C.^2 ; Glas, F.^2 ; Julien, F.H.^1 ; Lefeuvre, E.^1 ; Gogneau, N.^2 ; Tchernycheva, M.^1

Centre de Nanosciences et de Nanotechnologies - Site Orsay, Université Paris Saclay, Centre Scientifique d'Orsay, Orsay

F-91405, France^1

Centre de Nanosciences et de Nanotechnologies - Site Marcoussis, Université Paris- Saclay, Route de Nozay, Marcoussis

F-91460, France^2

GeePs, UMR 8507 CNRS-Centrale Supélec, Paris-Sud et UPMC Université, Gif-sur-Yvette

91192, France^3

关键词: GaN nanowires;    Mg-doping;    Plasma assisted molecular beam epitaxy;    Si(111) substrate;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012010/pdf
DOI  :  10.1088/1742-6596/773/1/012010

来源: IOP

【 摘 要 】

Here we employ self-assembled Mg-doped GaN nanowires (NWs) grown by plasma assisted molecular beam epitaxy on Si(111) substrates to fabricate piezogenerators. We first discuss the fabrication and testing of rigid nanowire-based generators and then a flexible generator prototype is shown.