Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples - key components and a first integration attempt

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Berglund, Martin^1,2 ; Khaji, Zahra^1,2 ; Klintberg, Lena^2 ; Persson, Anders^1,2 ; Sturesson, Peter^1,2,3 ; Breivik, Johan Söderberg^1,2 ; Thornell, Greger^1,2

Ångström Space Technology Centre, Uppsala University, Sweden^1

Div. of Microsystems Technology, Dept. of Engineering Sciences, Uppsala University, Sweden^2

Dept. of Military Studies, Swedish Defence University, Sweden^3

关键词: Cofired ceramics;    Extreme temperatures;    High temperature;    Optogalvanic spectroscopy;    Pressure and temperature sensors;    Ultra-small;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012029/pdf
DOI  :  10.1088/1742-6596/757/1/012029

学科分类：力学，机械学

来源: IOP

【 摘 要 】

This is a short summary of the authors' recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.