Engineering aspects of multilayer piezoceramic actuators

International Conference on Functional Materials and Nanotechnologies 2013

材料科学;物理学

Golovnin, V.A.^1 ; Kaplunov, I.A.^2 ; Ivanova, A.I.^2 ; Grechishkin, R.M.^2

Research Institute ELPA, JSC, Zelenograd, Russia^1

Tver State University, Tver, Russia^2

关键词: Cofired ceramics;    Energy dispersive microanalysis;    Engineering aspects;    Metal electrodes;    Monolithic actuators;    Multilayer ceramics;    Piezo-ceramic actuators;    Structural distortions;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/49/1/012033/pdf
DOI  :  10.1088/1757-899X/49/1/012033

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

With the increasing demand for multilayer ceramic chip components a full understanding of the co-firing of ceramics with metal electrodes becomes important. In the present work the processing of a piezoelectric monolithic actuator by stacking and cofiring Ag-Pd electroded tape cast layers was studied. The inter-diffusion and microstructure of the co-fired interface of PZT ferroelectrics and Ag-Pd metal electrode were examined by scanning electron microscopy (SEM) and energy-dispersive microanalysis. No strong structural distortions and interdiffusion were observed at the co-fired ceramic-electrode interface.