MEMS gas ionization sensor with palladium nanostructures for use at ambient pressure

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Müller, L.^1 ; Mehner, H.^1 ; Hoffmann, M.^1

Micromechanical Systems Group, IMN MacroNano, Technische Universität Ilmenau, Ilmenau

98693, Germany^1

关键词: Ambient gas;    Ambient pressures;    Gas ionization sensor;    Microfabricated;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012023/pdf
DOI  :  10.1088/1742-6596/757/1/012023

学科分类：力学，机械学

来源: IOP

【 摘 要 】

A microfabricated gas ionization sensor with integrated field enhancing silicon- palladium nanostructures is presented. The sensor can be used to determine the ambient gas by its specific breakdown voltage. Technological details of the fabrication and the assembly of the sensor are presented too.